What are the methods for maintaining sputtering targets?

Sputtering targets, as components, are widely used in microelectronics, displays, and other fields. During their use, sputtering target maintenance is an essential aspect. Regular maintenance can reduce residues on the target surface and improve target utilization efficiency. So, what are the methods for maintaining sputtering targets? Below, Fenglianke will guide you through them. Titanium Nitride Sputtering Target

Sputtering Target Maintenance Methods

1. Sputtering Target Maintenance

Target maintenance can prevent short circuits or arcing during sputtering due to unclean targets. Therefore, it is necessary to periodically remove deposits in the middle and sides of the sputtering track, helping users to continuously sputter at high power densities.

2. Sputtering Target Storage

For sputtering target storage, it is best to store them in vacuum packaging, especially bonded sputtering targets. They must be stored under vacuum conditions to prevent oxidation of the bonding layer, which could affect the bonding quality of the sputtering target. When storing metal sputtering targets, they can be stored in clean plastic bags, but vacuum packaging is preferable if possible.

3. Sputtering Target Cleaning

First, clean the target with a lint-free soft cloth soaked in acetone, then clean it with alcohol. After cleaning, rinse the target with deionized water. After cleaning, place the target in an oven at 100 degrees Celsius for 30 minutes to dry. For ceramic sputtering targets, it is recommended to use a lint-free cloth for cleaning. After completing the above steps, rinse the target with high-pressure, low-humidity argon gas to remove impurities that could cause arcing in the sputtering system.

4. Short Circuit and Sealing Inspection of Sputtering Targets

After installation, the entire cathode should be checked for short circuits and sealing. This is generally done using a megohmmeter to check for short circuits. After confirming that there are no short circuits, a sealing inspection is performed by passing water through the cathode to check for leaks. 5. Packaging and Transportation of Sputtering Targets

During the transportation of sputtering targets, pack them in vacuum-sealed bags with desiccant, then use wooden crates as outer packaging, and install shock-absorbing layers around the crates to protect the targets and backing plates from damage during transportation and storage.