Sputtering target preparation process and characteristics

We all know that there are many kinds of targets, such as alloys, oxides, copper, aluminum, stainless steel, nickel, titanium and other metals, and according to different metals, various target preparation methods are required.

Different process methods and characteristics of sputtering targets

1. Powder sintering method

Generally hot pressing, vacuum hot pressing, hot isostatic pressing and other processes will use the powder sintering method.

(1) Features: This preparation process has the characteristics of easy to obtain uniform fine-grained structure, saving raw materials, and high production efficiency. The key lies in the selection of high-purity, ultra-fine powder as the raw material, and the selection of forming and sintering technology that can achieve rapid densification, so as to ensure the low porosity of the target and control the grain size. The introduction of impurity elements needs to be strictly controlled during the preparation process.

(2) Suitable metals: suitable for W, Mo, Ru and other insoluble metals and alloys.

2. Melting and casting method

Generally, vacuum induction melting, vacuum arc melting, vacuum electron bombardment melting and other processes will use the melting and casting method.

(1) Features: Compared with the powder method, the smelting casting method has low impurity content in the smelting alloy target, especially the gas impurity content, and can be high-density and large-scale, but for metals with large differences in melting point and density, smelting It will be difficult to obtain alloy targets with uniform composition.

(2) Applicable metals: suitable for Al, Ti, Ni, Cu, Co, Ta, Ag, Pt and other metals with good plasticity.

3. Extrusion process

Generally, hot extrusion, cold extrusion, warm extrusion, etc. will use the extrusion process.

(1) Features: It is mainly used to prepare metal and alloy rotating targets with good plasticity.

(2) Applicable metals: suitable for Al, Cu, Zn and other metals with good plasticity.

4. Plasma spraying method

General vacuum, water stabilization, gas stabilization plasma spraying and other processes will use the plasma spraying method.

(1) Features: It can be used to prepare rotating targets such as brittle metals and alloys, ceramic targets, etc.

(2) Applicable metals: suitable for rotating targets such as Cr, Si, oxides, etc.

Through the above introduction, it can be known that the Titanium Nitride Sputtering Target preparation methods mainly include powder sintering method, smelting casting method, extrusion process, plasma spraying method, etc. Different processes have different application occasions, different characteristics, and different applicable metals, so different metals are used. The preparation process is different.

Titanium alloy forgings have great development potential

Titanium alloy forgings are not only widely used in aerospace manufacturing, but also can be used as steam turbine blades for thermal power generation to increase the length of steam turbine blades, thereby improving power generation efficiency and reducing the load on the rotor. In addition, Titanium Wing Nut also have certain applications in sports equipment, such as golf clubs, which allow the elastic hitting surface to store or release energy through a longer impact time to ease the impact, thus eliminating the need for Swing hard enough to hit the ball far. The wide application of titanium alloy forgings in various fields makes titanium alloy forgings have great development potential.

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Treatment of surface defects after titanium forgings are made into parts

Since titanium forgings are made into parts, their stress, importance, and working conditions are different during use, and their materials and metallurgical processes are also different. Therefore, different parts are divided into titanium forgings according to the above conditions and in accordance with the requirements of this department. In terms of categories, different departments and different standards classify titanium forgings differently. But in any case, the quality inspection of titanium forgings as a whole is inseparable from two types of inspections, namely the inspection of appearance quality and internal quality, but the categories of titanium forgings are different, and the specific inspection items, inspection quantities and inspection requirements Just different. For example, some industrial departments classify structural steel, stainless steel, and heat-resistant steel F9 Titanium Forging into Class IV for inspection; some departments classify aluminum alloy titanium forgings and die titanium forgings Aluminum alloy and copper alloy titanium forgings are divided into category IV for inspection.

Specifically, the appearance quality inspection of titanium forgings is to check whether the shape and geometric dimensions of titanium forgings meet the requirements of the drawing, whether there are defects on the surface of titanium forgings, what kind of defects are, and what are their morphological characteristics. The inspection content of the surface state is generally to check whether there are surface cracks, folds, wrinkles, pressure pits, orange peel, blisters, scars, corrosion pits, bruises, foreign objects, underfilling, pits, lack of meat, etc. on the surface of titanium forgings. Defects such as scratches. The internal quality inspection is to check the internal quality of the titanium forging itself, which is a quality condition that cannot be found in the appearance quality inspection. It includes not only checking the internal defects of the titanium forging, but also checking the mechanical properties of the titanium forging, and for important and key parts. Or large titanium alloy forged rings should also be analyzed for chemical composition. For internal defects, we will use low-magnification inspection, fracture inspection, and high-magnification inspection to check whether titanium forgings have internal cracks, shrinkage cavities, porosity, coarse grains, white spots, dendrites, streamlines that do not conform to the shape, streamlines, etc. Defects such as disorder, flow-through, coarse-grain ring, oxide film, delamination, overheating, and overfired tissue. As for the mechanical properties, it is mainly to check the tensile strength at room temperature, plasticity, toughness, hardness, fatigue strength, high temperature instantaneous fracture strength, high temperature durable strength, durable plasticity and high temperature creep strength, etc.

The existence of defects in titanium forgings, some will affect the quality of subsequent processes or processing, and some will seriously affect the performance and use of titanium forgings, and even greatly reduce the service life of finished products, endangering safety. Therefore, in order to ensure or improve the quality of titanium forgings, in addition to strengthening quality control in the process and taking corresponding measures to prevent the occurrence of titanium forging defects, necessary quality inspections should also be carried out to prevent subsequent processes (such as heat treatment, surface treatment, Cold working) and titanium forgings with defects that have adverse effects on performance flow into subsequent processes. After the quality inspection, remedial measures can also be taken for the manufactured titanium forgings according to the nature of the defects and the extent to which they affect the use, so as to make them meet the technical standards or use requirements.

Therefore, in a sense, the quality inspection of titanium forgings, on the one hand, is to check the quality of titanium forgings that have been produced, and on the other hand, it is to point out the direction of improvement for the forging process, so as to ensure that the quality of titanium forgings meets the requirements of titanium forgings technical standards. And meet the requirements of design, processing and use. The quality inspection of titanium forgings includes the inspection of appearance quality and internal quality. Appearance quality inspection mainly refers to the inspection of geometric dimensions, shapes, surface conditions and other items of titanium forgings; internal quality inspection mainly refers to the inspection of chemical composition, macrostructure, microstructure and mechanical properties of titanium forgings.

How to deal with the surface of the titanium tube?

The alloying of the surface of the titanium tube can also be called a coating. Compared with the oxide coating of palladium coated on titanium, it has the advantages of strong bonding, wear resistance and corrosion resistance. Compared with titanium-palladium alloy, the surface content of palladium is high, which saves the precious metal palladium, reduces the cost, and also has excellent performance.

Aluminizing the surface of the Titanium Coil Tube can reduce the tendency of titanium to absorb hydrogen. Mixing 88% alumina, 4% aluminum fluoride and 8% aluminum powder and coating it on the titanium workpiece is the best aluminizing condition. The temperature is 810°C . The thickness and structure of the aluminized layer depend on the holding time. Using the cladding aluminizing method, a thin coating about 2 mm thick can be obtained by short-term diffusion, which has good bonding force and does not affect the mechanical properties of the substrate. The coating consists mainly of a titanium oxide phase, forming a very effective barrier against hydrogen permeation.

After the palladium plating on the Titanium Condenser Tubes, it can be heated by different methods to diffuse the palladium plating layer to the surface area of the titanium tube to form a titanium-palladium alloyed layer on the surface, thereby improving the corrosion resistance. Thermal diffusion or laser surface remelting are possible in principle. Use the laser to irradiate the titanium surface to make it melt and condense rapidly, so that the pre-vacuum-deposited 150-micron palladium film can be rapidly melted to form an effective palladium alloy.

Titanium tube has excellent high temperature and low temperature performance

titanium seamless tubings have excellent high and low temperature performance. Seamless titanium tubes can still maintain good mechanical properties at high temperatures, and their heat resistance is higher than that of aluminum alloys, and the operating temperature range is wider. At present, the operating temperature of new heat-resistant titanium alloys can reach 550-600 ° C; At low temperature, the strength of titanium alloy is increased than that at normal temperature, and it has good toughness. Low-temperature titanium alloy can maintain good toughness at -253°C.

When the titanium bicycle tubing is used, the lower opening of the outer tube is usually connected to the faucet, because the water will automatically flow upward when it is heated in the condenser tube, so as to achieve a greater cooling effect. Jinxi Titanium Industry Technology Co., Ltd. is committed to providing better quality titanium tubes. Titanium welded tubes serve as high-quality products for refrigeration equipment condensers.

Introduction of Titanium Tube Material Titanium Alloy

Titanium tubes are light in weight, high in strength and good in mechanical properties. Titanium tubes are widely used in heat exchange equipment, such as shell and tube heat exchangers, coil heat exchangers, serpentine tube heat exchangers, condensers, evaporators and pipelines. Many nuclear power industries use titanium tubes as standard tubes for their units. titanium seamless pipe

Titanium tube material Titanium alloy is an alloy composed of titanium and other elements. Titanium has two kinds of allotropic crystals: below 882°C is close-packed hexagonal structure α-titanium, and above 882°C is body-centered cubic β-titanium. Grade 3 Pure Titanium Tube